Northern Ireland
Semiconductor Research Centre

 
Home Location Staff Publications Links
 

Introduction

 

Research Activities

Nanotechnology

System On Chip

Microelectromechanical Systems (MEMS)

Integrated Circuits and Electronic Devices

Silicon On Insulator (SOI)

Metallisation

Materials and Technology

Microelectronic Device Simulations

 

Research Opportunities

Research Contacts

Laboratory & Facilities

NISRC Members Only

 

Contact

Please address any queries regarding the group to :

Professor Harold Gamble

Microelectronics Group,

School of Electrical and Electronic Engineering, Queen's University Belfast, Ashby Building, Stranmillis Road, Belfast BT9 5AH, United Kingdom.

Tel.  : +44 (0)2890 975439

Fax. : +44 (0)2890 667023

Email : h.gamble@qub.ac.uk

 



Electro-osmotic Pumping

(by Dr. Paul V. Rainey)

The development of MEMS techniques has permitted the fabrication of microfluidic devices for chemical analysis including pumps, valves, flow sensors, separation capillaries, and chemical detectors. The advantages of miniaturized chemical analysis systems, increased speed, reduced reagent cost, reduced waste and in-situ analysis, have been predicted to revolutionize chemistry in the same way that the invention of the PC paved the way for the information revolution. In particular, interest in miniaturized Capillary Electrophoresis devices has grown dramatically, the advantages being the analysis of many different species at once and valveless flow removing the need for moving parts, which have proven difficult to down scale.

Fluid pumping in capillary electrophoresis is achieved by a phenomena known as Electro-osmotic flow (EOF). EOF is fluid motion induced by the interaction between the fluid charge at the wall of the channel and the external applied electric field. The rate of flow is proportional to applied voltage, pH and conductivity of the solution, and material of channel wall. It’s primary advantage over other pumping schemes is the fact that valves are not required to control fluid flow; the voltage magnitude and polarity are used to do this.

Click here to view  a video clip of liquid being electrically 'pumped' along a 100µm wide channel fabricated in the surface of silicon.

 

Figure 1.  Electro-osmotic pumping test structure.

References

  1. Rainey PV, Mitchell SJN, and Gamble HS, Optimization of conductivity monitoring in micromachined silicon capillaries”, SPIE Journal of Microlithography, Microfabrication, and Microsystems, vol. 1, issue 2, pp159-165  July 2002.

  2. Rainey PV, Mitchell SJN and Gamble HS, SPICE modelling of liquid capacitance in micromachined silicon capillaries”,. Proc. SPIE : MEMS Design, Fabrication, Characterisation and Packaging, vol. 4407, pp61-67, Edinburgh, May 2001.

  3. Rainey PV, Mitchell SJN, Gamble HS, “Electro-Kinetic Pumping In Silicon Based Capillaries” EPSRC PREP 2001, Keele UK, April 2001.