Semiconductor and Nanotechnology

NISRC

 
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Introduction

 

Research Activities

Nanotechnology

System On Chip

Microelectromechanical Systems (MEMS)

Integrated Circuits and Electronic Devices

Silicon On Insulator (SOI)

Metallisation

Materials and Technology

Microelectronic Device Simulation

 

Research Opportunities

Research Contacts

Laboratory & Facilities

NISRC Members Only

Forum

 

Contact

Please address any queries regarding the group to :

Professor Harold Gamble

Microelectronics Group,

School of Electrical and Electronic Engineering, Queen's University Belfast, Ashby Building, Stranmillis Road, Belfast BT9 5AH, United Kingdom.

Tel.  : +44 (0)2890 975439

Fax. : +44 (0)2890 667023

Email : h.gamble@qub.ac.uk

 



Specialised Techniques

 

  •   Silicon Wafer Bonding

  •   Precise Grinding & Polishing

  •   Dielectric Isolation

  •   Trench Etch and Fill

  •   Silicon on Glass

  •   Micromachining

  •   Mask Making

  •   Rapid Thermal Processing

  •   Rapid Thermal Epitaxy

  •   CVD Si3 N4, SiO2,  and Metals

  •   PVD Metals & Insulators

  •   Burried Metal Layers

  •   Metal Silicides

  •   Gold Plating